Control of slurry flow, temperature and aggressive diamonds in chemical mechanical planarization

Text Registration

Control of slurry flow, temperature and aggressive diamonds in chemical mechanical planarization

Status

Published

on 21 May 2015

Year of Creation

2015

Changhong Wu

Registration Number

TX0008088838

on 21 May 2015

The U.S. Copyright record (Registration Number: TX0008088838) dated 21 May 2015, pertains to an electronic file (eService) titled "Control of slurry flow, temperature and aggressive diamonds in chemical mechanical planarization" created in 2015. The copyright holder is Changhong Wu, known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Changhong Wu.

Changhong Wu

Application Details

Registration Number

TX0008088838

Registration Date

5/21/2015

Year of Creation

2015

Agency Marc Code

DLC-CO

Record Status

Changed

Physical Description

Electronic file (eService)

First Publication Nation

United States

Personal Authors

Changhong Wu

Notes

Rights Note: Diana G Zajic, ProQuest-CSA, LLC, 789 E. Eisenhower Parkway, Ann Arbor, MI, 48108-3218, United States, (800) 521-0600 x7020, disspub@email.com

Statements

Application Title Statement: Control of slurry flow, temperature and aggressive diamonds in chemical mechanical planarization

Author Statement: Changhong Wu Citizenship: not known Authorship: text

Notes

Rights Note: Diana G Zajic, ProQuest-CSA, LLC, 789 E. Eisenhower Parkway, Ann Arbor, MI, 48108-3218, United States, (800) 521-0600 x7020, disspub@email.com

Statements

Application Title Statement: Control of slurry flow, temperature and aggressive diamonds in chemical mechanical planarization

Author Statement: Changhong Wu Citizenship: not known Authorship: text

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