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Text Registration
Copyright Title
Electron-beam, X-ray, and ion-beam technology submicrometer lithographies VII Arnold W. Yanof, editor
Status
Published
on 14 Jun 2007
Year of Creation
1988
Copyright Claimant
International Society for Optical Engineering
Registration Number
TX0002368034
on 14 Jun 2007Copyright Summary
The U.S. Copyright record (Registration Number: TX0002368034) dated 14 Jun 2007, pertains to an electronic file (eService) titled "Electron-beam, X-ray, and ion-beam technology submicrometer lithographies VII Arnold W. Yanof, editor" created in 1988. The copyright holder is International Society for Optical Engineering, known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to International Society for Optical Engineering.
Application Details
Registration Number
TX0002368034
Registration Date
6/14/2007
Year of Creation
1988
Place of First Publication
Bellingham, Wash
Publisher Name
SPIE
Agency Marc Code
DLC-CO
Record Status
New
Corporate Author
International Society for Optical Engineering
Physical Description
307 p
Series Statement
Proceedings of S P I E v. 923
Statements
Author Statement: International Society for Optical Engineering, employer for hire
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