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Visit USCOPhenomenological modeling of plasma generation for the real-time control of RIE systems
Text Registration
Copyright Title
Phenomenological modeling of plasma generation for the real-time control of RIE systems
Status
Published
on 14 Jun 2007
Year of Creation
1996
Copyright Claimant
Manish Chandhok
Registration Number
TX0004479382
on 14 Jun 2007Copyright Summary
The U.S. Copyright record (Registration Number: TX0004479382) dated 14 Jun 2007, pertains to an electronic file (eService) titled "Phenomenological modeling of plasma generation for the real-time control of RIE systems" created in 1996. The copyright holder is Manish Chandhok, known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Manish Chandhok.
Application Details
Registration Number
TX0004479382
Registration Date
6/14/2007
Year of Creation
1996
Agency Marc Code
DLC-CO
Record Status
New
Physical Description
Microfiche
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