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Text Registration
Copyright Title
Intense capillary discharge plasma extreme-ultraviolet sources for extreme-ultraviolet lithography and other extreme-ultraviolet imaging applications
Status
Published
on 14 Jun 2007
Year of Creation
1998
Copyright Claimant
Marc Alexander Klosner
Registration Number
TX0005358505
on 14 Jun 2007Copyright Summary
The U.S. Copyright record (Registration Number: TX0005358505) dated 14 Jun 2007, pertains to an electronic file (eService) titled "Intense capillary discharge plasma extreme-ultraviolet sources for extreme-ultraviolet lithography and other extreme-ultraviolet imaging applications" created in 1998. The copyright holder is Marc Alexander Klosner, known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Marc Alexander Klosner.
Application Details
Registration Number
TX0005358505
Registration Date
6/14/2007
Year of Creation
1998
Agency Marc Code
DLC-CO
Record Status
New
Physical Description
Computer text data
Notes
Rights Note: Rights and permissions info. on CORDS appl. in CO
Bibliographic Note: Electronic registration
Statements
Author Statement: entire text: Marc Alexander Klosner
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