Geometry and stress effects in scaled integrated circuit isolation technologies

Status

Published

on 14 Jun 2007

Year of Creation

1996

Peter Smeys

Registration Number

TX0004462273

on 14 Jun 2007

The U.S. Copyright record (Registration Number: TX0004462273) dated 14 Jun 2007, pertains to an electronic file (eService) titled "Geometry and stress effects in scaled integrated circuit isolation technologies" created in 1996. The copyright holder is Peter Smeys, known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Peter Smeys.

Peter Smeys

Application Details

Registration Number

TX0004462273

Registration Date

6/14/2007

Year of Creation

1996

Agency Marc Code

DLC-CO

Record Status

New

Physical Description

Microfiche

Personal Authors

Peter Smeys

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