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Effects of chamber wall conditions on plasma etching processes
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Copyright Title

Effects of chamber wall conditions on plasma etching processes

Status

Published

on 14 Jun 2007
Year of Creation
2002
Copyright Claimant
Saurabh Jayesh Ullal
Registration Number
TX0005602301
on 14 Jun 2007

Copyright Summary


The U.S. Copyright record (Registration Number: TX0005602301) dated 14 Jun 2007, pertains to an electronic file (eService) titled "Effects of chamber wall conditions on plasma etching processes" created in 2002. The copyright holder is Saurabh Jayesh Ullal, known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Saurabh Jayesh Ullal.

Copyright Details


Copyright Claimant
Saurabh Jayesh Ullal

Application Details


Registration Number
TX0005602301
Registration Date
6/14/2007
Year of Creation
2002
Agency Marc Code
DLC-CO
Record Status
New
Physical Description
Computer text data

Personal Authors


Notes


Rights Note: Rights and permissions info. on CORDS appl. in CO
Bibliographic Note: Electronic registration

Statements


Author Statement: entire text: Saurabh Jayesh Ullal
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