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Category SearchMetrology-based control for micro-manufacturing 24-25 January 2001, San Jose, USA Kenneth W. Tobin, Jr., Fred Lakhani, chairs/editors
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Copyright Title
Metrology-based control for micro-manufacturing 24-25 January 2001, San Jose, USA Kenneth W. Tobin, Jr., Fred Lakhani, chairs/editors
Status
Published
on 14 Jun 2007
Year of Creation
2001
Copyright Claimant
Society of Photo-Optical Instrumentation Engineers (employer for hire)
Registration Number
TX0005400426
on 14 Jun 2007Copyright Summary
The U.S. Copyright record (Registration Number: TX0005400426) dated 14 Jun 2007, pertains to an electronic file (eService) titled "Metrology-based control for micro-manufacturing 24-25 January 2001, San Jose, USA Kenneth W. Tobin, Jr., Fred Lakhani, chairs/editors" created in 2001. The copyright holder is Society of Photo-Optical Instrumentation Engineers (employer for hire), known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Society of Photo-Optical Instrumentation Engineers (employer for hire).
Copyright Details
Copyright Claimant
Society of Photo-Optical Instrumentation Engineers (employer for hire)
Application Details
Registration Number
TX0005400426
Registration Date
6/14/2007
Year of Creation
2001
Place of First Publication
Bellingham, WA
Publisher Name
SPIE
Agency Marc Code
DLC-CO
Record Status
New
Corporate Author
Society of Photo-Optical Instrumentation Engineers
Physical Description
156 p
Series Statement
SPIE proceedings series vol. 4275
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