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Device and process technologies for MEMS, microelectronics, and photonics III 10-12 December 2003, Perth, Australia Jung-Chih Chiao, Alex J. Hariz, David N. Jamieson ... [et al.], chairs/editors
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Device and process technologies for MEMS, microelectronics, and photonics III 10-12 December 2003, Perth, Australia Jung-Chih Chiao, Alex J. Hariz, David N. Jamieson ... [et al.], chairs/editors

Status

Published

on 15 Jun 2007
Year of Creation
2003
Registration Number
TX0005996191
on 15 Jun 2007

Copyright Summary


The U.S. Copyright record (Registration Number: TX0005996191) dated 15 Jun 2007, pertains to an electronic file (eService) titled "Device and process technologies for MEMS, microelectronics, and photonics III 10-12 December 2003, Perth, Australia Jung-Chih Chiao, Alex J. Hariz, David N. Jamieson ... [et al.], chairs/editors" created in 2003. The copyright holder is Society of Photo-Optical Instrumentation Engineers (employer for hire), known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Society of Photo-Optical Instrumentation Engineers (employer for hire).

Application Details


Registration Number
TX0005996191
Registration Date
6/15/2007
Year of Creation
2003
Place of First Publication
Bellingham, WA
Publisher Name
SPIE
Agency Marc Code
DLC-CO
Record Status
New
Corporate Author
Society of Photo-Optical Instrumentation Engineers
Physical Description
566 p
Series Statement
SPIE proceedings series vol. 5276
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