2009

Development of thin film encapsulation process for piezoresistive MEMS gyroscope with wide gaps

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Development of thin film encapsulation process for piezoresistive MEMS gyroscope with wide gaps

Status

Published

on 13 Apr 2009

Year of Creation

2008

Vipin Ayanoor-Vitikkate

Registration Number

TX0006657518

on 13 Apr 2009

The U.S. Copyright record (Registration Number: TX0006657518) dated 13 Apr 2009, pertains to an electronic file (eService) titled "Development of thin film encapsulation process for piezoresistive MEMS gyroscope with wide gaps" created in 2008. The copyright holder is Vipin Ayanoor-Vitikkate, known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Vipin Ayanoor-Vitikkate.

Vipin Ayanoor-Vitikkate

Application Details

Registration Number

TX0006657518

Registration Date

4/13/2009

Year of Creation

2008

Agency Marc Code

DLC-CO

Record Status

New

Physical Description

Computer text data

Personal Authors

Vipin Ayanoor-Vitikkate

Vipin Ayanoor Vitikkate

Notes

Rights Note: Rights and permissions info. on CORDS appl. in CO

Local Copyright Note: Electronic registration

Statements

Author Statement: entire text: Vipin Ayanoor-Vitikkate

Notes

Rights Note: Rights and permissions info. on CORDS appl. in CO

Local Copyright Note: Electronic registration

Statements

Author Statement: entire text: Vipin Ayanoor-Vitikkate

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