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Plasma induced damage to silicon and silicon germanium devices and materials
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Text Registration
Copyright Title

Plasma induced damage to silicon and silicon germanium devices and materials

Status

Published

on 14 Jun 2007
Year of Creation
2001
Copyright Claimant
Wei Zhong
Registration Number
TX0005481736
on 14 Jun 2007

Copyright Summary


The U.S. Copyright record (Registration Number: TX0005481736) dated 14 Jun 2007, pertains to an electronic file (eService) titled "Plasma induced damage to silicon and silicon germanium devices and materials" created in 2001. The copyright holder is Wei Zhong, known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Wei Zhong.

Copyright Details


Copyright Claimant
Wei Zhong

Application Details


Registration Number
TX0005481736
Registration Date
6/14/2007
Year of Creation
2001
Agency Marc Code
DLC-CO
Record Status
New
Physical Description
Computer text data

Personal Authors


Notes


Rights Note: Rights and permissions info. on CORDS appl. in CO
Bibliographic Note: Electronic registration

Statements


Author Statement: entire text: Wei Zhong
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